ESA系列是新研發(fā)的獨特干式真空泵,具有優(yōu)越的高速排氣性能,從而適應(yīng)了LCD濺射制膜裝置,真空干燥制程,大型
L/L等工藝要求。并擁有高附加價值,對應(yīng)氣體負荷自動控制轉(zhuǎn)速,高通信功能等。
| ESA Series | ||||||
| Specifications | Unit | ESA25S | ESA70W | ESA200W | ESA300W | ESA500W |
| Pumping Speed 50/60 Hz | CFM | 88/106 | 274/296 | 706 | 1060 | 1766 |
| L/min | 2500/3000 | 7000/8400 | 20000 | 30000 | 50000 | |
| M3/Hr | 150/180 | 420/504 | 1200/504 | 1800 | 3000 | |
| Ultimate Pressure 50/60 Hz | mTorr | 3.98*10-5/3.00*10-5 | 3.00*10-6/2.03*10-6 | 3.97533E-06 | 4 | 7.5*10-6 |
| Pa | 5.3/4.0 | 0.4/0.27 | 0.53 | 0.53 | 1 | |
| mBar | 0.053/.04 | 0.004/0.0027 | 0.0053 | 0.0053 | 0.01 | |
| Connection | Gas Inlet | NW 50 | NW 50 | NW 80 | ISO 100 | ISO 100 |
| Gas Outlet | NW 40 | NW 40 | NW 40 | NW 40 | NW 50 | |
| Power at Ultimate Pressure | KW | 3.4 | 7.3 | 6.7 | ||
| Maximum Power | KW | 4 | 12.5 | 24.1 | ||
| Cooling Water Requirements | Min. Flow Rate | 3.5 | 3.5 | 3.5 | 6 | 6 |
| L/min | ||||||
| Bearing and Dilution N2 | Bearing Seals | 11 | 15 | 12 | 5 | 6 |
| L/min | ||||||
| Cabinet Dimensions | inches | 35.4 x 15.5 x 19.7 | 39.3 x 15.7 x 31.5 | 38.2 x 15.7 x 31.9 | 43.7 x 24.4 x 35.6 | 60.5 x 24.4 x 41.1 |
| LxWxH | mm | 900 x 394 x 500 | 997 x 400 x 800 | 970 x 400 x 810 | 1110 x 620 x 905 | 1537 x 620 x 1045 |
| Weight | lbs | 528 | 836 | 902 | 1543 | 1650 |
| kg | 240 | 380 | 410 | 700 | 750 |